COPRA Products
COPRA Products
COPRA Round Sources
Overview
DN160-CF-GM
DN201-X-GR
DN201-X-GM
DN250-CF-GRPE
DN251-ISO-K-EGRPE
DN401-GRPE
DN501-GRPE
DN-custom design
COPRA Linear Sources
Overview
LS360x200-GRPE
LS500x500-DPRPE
LS670x203-GRPE
LS800x250-DPRPE
LS1100x202-GRPE
LS1300x202-GRPE
LS-custom design
COPRA Ring Sources
Overview
RS1000x300-DPR
RS1000x402-DPR
RS650x550-DPR
RS700x600-DPR
RS850x850-DPR
RS400-DPR
RS500x500-DPR
RS-custom design
COPRA Built In Sources
Overview
COPRA IS201-G(I)R(PE)
IS201-EG(I)R(PE)
IS301-EGIRPE
IS400-EGIRPE
IS502-EGIRPE
IS1100x250-GRPE
IS-custom design
Faraday Cup System
Applications
Applications
PECVD
PECVD
PVD Assist
PVD-Assist
Sputter Assist
COPRA Thermal & E-Beam Evaporation Assist
Etching
Reactive Etching
Physical Etching
Cleaning & Activation
PALD-Assist
COPRA´s Basics
R&D
News/Events
Contact
Jobs/Career
Partners
Impressum/Disclaimer
